{"id":93,"date":"2015-09-14T21:41:30","date_gmt":"2015-09-14T19:41:30","guid":{"rendered":"http:\/\/www.simnano.de\/?p=93"},"modified":"2015-11-19T14:06:03","modified_gmt":"2015-11-19T13:06:03","slug":"surface-chemistry-of-copper-metal-and-copper-oxide-atomic-layer-deposition","status":"publish","type":"post","link":"https:\/\/www.simnano.de\/?p=93","title":{"rendered":"Surface chemistry of copper metal and copper oxide atomic layer deposition"},"content":{"rendered":"<p><a href=\"http:\/\/www.simnano.de\/wp-content\/uploads\/2015\/11\/Cu_acac_2.png\"><img loading=\"lazy\" decoding=\"async\" class=\"alignleft size-thumbnail wp-image-94\" src=\"http:\/\/www.simnano.de\/wp-content\/uploads\/2015\/11\/Cu_acac_2-150x150.png\" alt=\"Cu_acac_2\" width=\"150\" height=\"150\" \/>[bibshow file =js.bib]<\/a><\/p>\n<p>In a <a href=\"http:\/\/pubs.rsc.org\/en\/content\/articlehtml\/2015\/cp\/c5cp03707g\">recent paper in <em>Physical chemistry chemical Physis<\/em> <\/a>we study the mechanisms for atomic layer deposition using the Cu(acac)<small><sub>2<\/sub><\/small>\u00a0precursor [bibcite key=hu2015surface]. By first-principles calculations and reactive molecular dynamics simulations\u00a0we\u00a0show that Cu(acac)<small><sub>2<\/sub><\/small> chemisorbs on the hollow site of the Cu(110) surface and decomposes easily into a Cu atom and the acac-ligands. <!--more-->We observe a sequential dissociation and reduction of the Cu precursor [Cu(acac)<small><sub>2<\/sub><\/small> \u2192 Cu(acac) \u2192 Cu] \u00a0while\u00a0further decomposition of the acac-ligand is unfavorable on the Cu surface. \u00a0By comparing the reactivity of different\u00a0co-reactants toward Cu(acac)<small><sub>2\u00a0<\/sub><\/small>we could show that atomar hydrogen is more reactive than ozone. Water is even less reactive than ozone.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>[bibshow file =js.bib] In a recent paper in Physical chemistry chemical Physis we study the mechanisms for atomic layer deposition using the Cu(acac)2\u00a0precursor [bibcite key=hu2015surface]. By first-principles calculations and reactive molecular dynamics simulations\u00a0we\u00a0show that Cu(acac)2 chemisorbs on the hollow site &hellip; <a href=\"https:\/\/www.simnano.de\/?p=93\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[20,3],"tags":[19,17],"_links":{"self":[{"href":"https:\/\/www.simnano.de\/index.php?rest_route=\/wp\/v2\/posts\/93"}],"collection":[{"href":"https:\/\/www.simnano.de\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.simnano.de\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.simnano.de\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.simnano.de\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=93"}],"version-history":[{"count":1,"href":"https:\/\/www.simnano.de\/index.php?rest_route=\/wp\/v2\/posts\/93\/revisions"}],"predecessor-version":[{"id":95,"href":"https:\/\/www.simnano.de\/index.php?rest_route=\/wp\/v2\/posts\/93\/revisions\/95"}],"wp:attachment":[{"href":"https:\/\/www.simnano.de\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=93"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.simnano.de\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=93"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.simnano.de\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=93"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}